JPS6221004Y2 - - Google Patents
Info
- Publication number
- JPS6221004Y2 JPS6221004Y2 JP18837782U JP18837782U JPS6221004Y2 JP S6221004 Y2 JPS6221004 Y2 JP S6221004Y2 JP 18837782 U JP18837782 U JP 18837782U JP 18837782 U JP18837782 U JP 18837782U JP S6221004 Y2 JPS6221004 Y2 JP S6221004Y2
- Authority
- JP
- Japan
- Prior art keywords
- push rod
- cradle
- box
- guide rail
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003860 storage Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 239000000428 dust Substances 0.000 description 3
- 206010034719 Personality change Diseases 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18837782U JPS5991731U (ja) | 1982-12-13 | 1982-12-13 | ウエハ−収納容器固定用箱の起立装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18837782U JPS5991731U (ja) | 1982-12-13 | 1982-12-13 | ウエハ−収納容器固定用箱の起立装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5991731U JPS5991731U (ja) | 1984-06-21 |
| JPS6221004Y2 true JPS6221004Y2 (en]) | 1987-05-28 |
Family
ID=30406400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18837782U Granted JPS5991731U (ja) | 1982-12-13 | 1982-12-13 | ウエハ−収納容器固定用箱の起立装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5991731U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0737312Y2 (ja) * | 1985-02-16 | 1995-08-23 | 関西日本電気株式会社 | 遠心乾燥装置 |
-
1982
- 1982-12-13 JP JP18837782U patent/JPS5991731U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5991731U (ja) | 1984-06-21 |
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